SENTINEL Block Controller for Axcelis GSD Ion Implanters

The SENTINEL block controller for the Axcelis GSD Ion Implanters supports additional capabilities with advanced data collection that exceeds the OEM built-in logging capability.

Features and Specifications

  • High frequency beam monitoring (~5 samples / second)
  • Remote recipe editing and verification of 'golden recipe'
  • Optimized database allows for responsive data analysis
  • Data export capability to allow further analysis using preferred statistics package
  • Fault detection control (FDC) and statistical process control (SPC)
  • FDC and SPC email notifications
  • Programmable usage based PM counters

Contact us today for more details or to arrange for a demonstration.